The S5012EX gas mass flow sensor is fabricated using a micro-electromechanical system (MEMS) flow sensor chip for clean, relatively dry, low-flow gas measurement and process control for a variety of applications. The unique packaging technology allows the product to meet a wide range of flow measurements. To ensure high sensitivity, high reliability, high stability and low cost.
S5012EX is based on MEMS flow sensing unit and high precision digital processing and calibration circuit (MCU). The integrated delta-sigma A/D converter and logic circuit with internal calibration function and MCU processor ensure the real-time effective sensing signal. Acquisition, accurate flow signal, and internal compensation algorithm processing, so no need to do any external calibration compensation, can ensure high-precision flow output; friendly digital output communication, users can easily get communication gets the corresponding data information; the product application range is very broad.

Application

 ■ Industrial ■ Medical ■ Petroleum ■ Gas ■ Chemical ■ Smelting ■ Food Processing ■ Instrumentation ■ Electromechanical Equipment

Feature

High precision (1.5% F.S accuracy) and long-term zero drift stability

Linear output and no temperature compensation, fast response time (10 ms response time)

The flow rate range is 0-60m/s wide and the impact resistance is 100g.

Solid-state sensing core (no surface void or fragile membrane), anti-blocking and pressure shock

It can provide a variety of output modes: analog output (1-5V), I2C or RS485

The sensor can be used for the measurement of relative humidity gas, and the sensor can resist condensation water

Working temperature: -25°C to 85°C, storage temperature: -40°C to 90°C, humidity: 0 to 100% RH

Parameter

Linear Output

Flow = [(VOUT -1 V) / 4 V] × full scale flow

For example: CAFS5012EX has a full-scale traffic of 100slpm.

When the output voltage is read at 2.5V, the instantaneous flow rate is [（2.5V-1V）/4V×100slpm] =37.5 slpm

Dimension