Description

S3000 series of micro-gas flow sensors are fabricate with MEMS flow chips and applied to measure kinds of clean and dry micro-gas flow and process control with special package technology and satisfy with different flow range measurement with same diameter.  It has advantage of high sensitivity and reliability and low cost and very wide applications.

Feature

■Flow range: 0- 3000 (50, 100, 1000, 2000, 2500, 3000)sccm

■High precision ( ±1.5 %FS accuracy)

■Linear output and no temperature compensation

■Maintain long-term stability with minimal zero drift

■Solid-state sensing core (no surface void or fragile membrane), anti-blocking and pressure shock

■Analog output ( 1 - 5 V) ( I2C or RS485 are also available )

■Fast response time ( 1 ms response time)

■Can adapt to relatively humid gas measurement

Application

■ Oxygen generator

■ Anti-virus mask and respirator

■ Sprayer

■ Anesthesia delivery

■ Leak

■ Spectrometer

■ Continuous positive airway pressure ( CPAP) equipment

■ Mass flow controllers

■ Communication systems

■ Environmental climate control system

Maximum rating

■Operating temperature: -25 ° C to 85 ° C

■Storage temperature: -40 ° C to 90 ° C

■Humidity: 0 ~ 100% RH *  

■Sensor anti- shock up to 100 g

■The sensor is resistant to condensation

Linear Output

Flow = [(VOUT -1 V) / 4 V]  ×  full scale flow

For example: S3000 has a full-scale flow of 1000 sccm. When the output voltage is read at 2.5V,  the instantaneous flow rate is

[（2.5V-1V）/4V×1000 sccm] =375sccm

Dimension

Output Lead Definition